AlN, ZnO thin films and AlN/ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave applications

Publisher： John Wiley & Sons Inc

E-ISSN： 1862-6319|212|4|817-825

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.4, 2015-04, pp. : 817-825

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