A Novel Turbomolecular Pump for R&D and Analytical Applications

Publisher: John Wiley & Sons Inc

E-ISSN: 1522-2454|27|2|30-35

ISSN: 0947-076x

Source: VAKUUM IN FORSCHUNG UND PRAXIS, Vol.27, Iss.2, 2015-04, pp. : 30-35

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Abstract