Direct evidence of self‐aligned Si nanocrystals formed by ion irradiation of Si/SiO2 interfaces

E-ISSN： 1862-6319|202|15|R170-R172

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.202, Iss.15, 2005-12, pp. : R170-R172

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