Surface Characteristics of MoNx Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System

Publisher: John Wiley & Sons Inc

E-ISSN: 1229-5949|1229-5949|10|2446-2450

ISSN: 1229-5949

Source: BULLETIN OF THE KOREAN CHEMICAL SOCIETY (ELECTRONIC), Vol.1229-5949, Iss.10, 2015-10, pp. : 2446-2450

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Abstract