Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces

Publisher: John Wiley & Sons Inc

E-ISSN: 1612-8869|12|9|926-940

ISSN: 1612-8850

Source: PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.9, 2015-09, pp. : 926-940

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Abstract