Effect of surface segregation on the sharpness of heteroboundaries in multilayered Si(Ge)/Si1−x Gex structures grown from atomic beams in vacuum

Author: Ivina N.   Orlov L.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.43, Iss.6, 2001-06, pp. : 1182-1187

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