Effect of the composition of the solid solution on the high-temperature microhardness of SiGe heteroepitaxial layers grown on Ge and Si substrates

Author： Mezhennyi M.   Mil’vidskii M.   Yugova T.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.45, Iss.9, 2003-09, pp. : 1723-1726

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