Formation of two-dimensional photonic-crystal structures in silicon for near-infrared region using fine focused ion beams

Author： Vyatkin A.   Gavrilin E.   Gorbatov Yu.   Starkov V.   Sirotkin V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.46, Iss.1, 2004-01, pp. : 32-34

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