Structure, impurity composition, and photoluminescence of mechanically polished layers of single-crystal silicon

Author： Batalov R.   Bayazitov R.   Khusnullin N.   Terukov E.   Kudoyarova V.   Mosina G.   Andreev B.   Kryzhkov D.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.47, Iss.1, 2005-01, pp. : 1-4

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