Preparation of high-quality epitaxial silicon layers by vapor-phase epitaxy

Author： Samoilov N.   Eliseev A.   Shutov S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.42, Iss.2, 1997-02, pp. : 241-242

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