Salient features of the analysis of layered structures by means of ion sputtering

Author： Dorozhkin A.   Filimonov A.   Kovarskii A.   Kudryavtsev Yu.   Petrov N.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.42, Iss.9, 1997-09, pp. : 1091-1093

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