Phase transformations and changes in the electrophysical properties of Ti-Si contacts irradiated by a nitrogen-hydrogen plasma

Author： Chaplanov A. Shcherbakova E.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.45, Iss.10, 2000-10, pp. : 1331-1334

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