The effect of energetic oxygen atoms on the formation of CuO films by magnetron sputtering

Author: Sher É.   Mikushkin V.   Sysoev S.   Melekh B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.45, Iss.3, 2000-03, pp. : 365-368

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