The effect of dopants on the texture formation in MBE-grown polysilicon films

Author： Gracheva T.   Malygin N.   Shengurov D.   Shengurov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.45, Iss.9, 2000-09, pp. : 1212-1213

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