Development of methods for multidimensional measurements in the optical investigation of surface

Author： Rodionov A.   Zubkov B.   Kalinin A.   Lyubimov V.   Osipov A.   Rodionov I.   Rodionova I.   Shilov I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.47, Iss.10, 2002-10, pp. : 1272-1276

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