Single-ion-beam experimental setup for combined implantation and deposition

Author： Komarov F.   Kamarou A.   Zukowski P.   Karwat Cz.   Sielanko J.   Kiszak K.   Komarov A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.48, Iss.5, 2003-05, pp. : 631-635

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