Self-organization during deposition of semiconductor films in the atmosphere of atomic hydrogen

Author： Romashin S.   Sedov A.   Kasatkin É.   Kharlamov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.49, Iss.8, 2004-08, pp. : 1089-1092

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