Interference nanolithography with a UV laser

Author： Bredikhin V. Burenina V. Verevkin Yu. Kirsanov A. Petryakov V. Vostokov N. Dryakhlushin V. Klimov A.

ISSN： 1063-7842

Source： Technical Physics, Vol.49, Iss.9, 2004-09, pp. : 1191-1195

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