Thermal stability of thin amorphous Ta-Si-N films used in Au/GaN metallization

Author： Kuchuk A.   Klad’ko V.   Machulin V.   Piotrowska A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.51, Iss.10, 2006-10, pp. : 1383-1385

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