Phase transitions in the CNx-TiN system attendant on the variation of the bias voltage during ion-stimulated growth

Author: Samoilenko Z.   Pushenko E.   Ivakhnenko N.   Shkuratov B.   Varyukhin V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.52, Iss.5, 2007-05, pp. : 631-635

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