Synthesis of carbon films in a plasma-chemical reactor based on beam-plasma discharge

Author: Shustin E.   Isaev N.   Klykov I.   Peskov V.   Polyakov V.   Rukovishnikov A.   Temiryazeva M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.58, Iss.2, 2013-02, pp. : 245-250

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