Role of argon in its mixture with nitrogen in deposition of nitride condensates in the Ti-Si-N system and in vacuum arc deposition processes

Author： Belous V.   Zadneprovskii Yu.   Lomino N.   Sobol’ O.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.58, Iss.7, 2013-07, pp. : 999-1006

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