Investigation of the degradation of silane molecules in a pulsed volume discharge

Author： Shuaibov A.   Shimon L.   Dashchenko A.   Minya A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.24, Iss.11, 1998-11, pp. : 844-845

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