Ion energy cost in a combined inductive-capacitive rf discharge

Author: Dudin S.   Zykov A.   Polozhii K.   Farenik V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.11, 1998-11, pp. : 881-883

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