Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance

Author: Suzdal’tsev S.   Sysuev S.   Yafarov R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.2, 1998-02, pp. : 135-137

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