Self-organization phenomena accompanying deformation-thermal instability during anodic etching of silicon in a HF solution

Author： Prokaznikov 1   2A.   Kuznetsov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.3, 1999-03, pp. : 242-244

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