Long-range gettering of microdefects in silicon single crystals during the formation of porous silicon layers on their surface and ion irradiation

Author： Perevoshchikov V. Skupov V.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.4, 1999-04, pp. : 315-316

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