Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions

Author： Kurnaev V.   Trifonov N.   Drozdov M.   Salashchenko N.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.6, 1999-06, pp. : 442-443

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