Doping of silicon layers from a sublimating erbium source in molecular beam epitaxy

Author： Svetlov S. Chalkov V. Shengurov V. Uskova E. Maksimov G. Andreev B. Krasil’nik Z. Stepikhova M. Ellmer H.

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.26, Iss.1, 2000-01, pp. : 41-43

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