Laser-initiated anomalous diffusion of oxygen in a surface silicon layer enriched with defects

Author： Banishev A.   Golubev V.   Kremnev A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.26, Iss.1, 2000-01, pp. : 49-50

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

MATERIAL DEPOSITION AND REMOVAL USING LASER-INITIATED CHEMISTRY

By  

Le Journal de Physique Colloques, Vol. 44, Iss. C5, 1983-10 ,pp. : C5-133-C5-138

Edp Sciences

Access to resources Recommend Favorite

ELECTRON SPIN RESONANCE INVESTIGATION OF THE EFFECTS OF THE H2+ IMPLANTATION AND DIFFUSION ONE THE LASER INDUCED DEFECTS IN VIRGIN SILICON

By  

Le Journal de Physique Colloques, Vol. 44, Iss. C5, 1983-10 ,pp. : C5-307-C5-311

Edp Sciences

Access to resources Recommend Favorite

SURFACE-LAYER THICKNESS AND NEAR-SURFACE DIFFUSION OF OXYGEN IN Y2O3

By  

Le Journal de Physique Colloques, Vol. 51, Iss. C1, 1990-01 ,pp. : C1-507-C1-512

Edp Sciences

Access to resources Recommend Favorite

Effect of the ambient atmosphere and the gas type on generation of defects and destruction of silicon surface under the action of laser pulses

By Banishev A.   Golubev V.   Kremnev A.  

Technical Physics, Vol. 49, Iss. 8, 2004-08 ,pp. : 1035-1039

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Anomalous diffusion of ions at the surface of hydrated DNA molecule

By  

EPL (EUROPHYSICS LETTERS), Vol. 82, Iss. 4, 2008-05 ,pp. : 46002-46002

Edp Sciences

Access to resources Recommend Favorite