Real structure of a microchannel silicon studied by X-ray diffraction

Author： Astrova E.   Ratnikov V.   Remenyuk A.   Tkachenko A.   Shul’pina I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.27, Iss.1, 2001-01, pp. : 41-44

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