A new method for determining the sharpness of InGaAs/GaAs heterojunctions by auger depth profiling

Author： Drozdov M.   Danil’tsev V.   Drozdov Yu.   Khrykin O.   Shashkin V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.27, Iss.10, 2001-10, pp. : 868-870

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