An analog of the hollow cathode effect in low-pressure high-frequency capacitive discharge

Author： Malik D.   Orlov K.   Smirnov A.   Chernoizyumskaya T.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.29, Iss.6, 2003-06, pp. : 525-527

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