The transition from 2D to 3D nanoclusters of silicon carbide on silicon

Author： Trushin Yu.   Safonov K.   Ambacher O.   Pezoldt J.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.29, Iss.8, 2003-08, pp. : 663-665

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