SIMS analysis of ultrathin implanted arsenic layers in silicon

Author: Kibalov D.   Orlov O.   Simakin S.   Smirnov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.30, Iss.11, 2004-11, pp. : 897-899

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