The effect of thermal treatment on the structure of tantalum oxide films grown on titanium

Author： Zhabrev V.   Bystrov Yu.   Efimenko L.   Komlev A.   Baryshnikov V.   Kolomiitsev A.   Shapovalov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.30, Iss.5, 2004-05, pp. : 396-398

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