Effect of implanted phosphorus ions on the crystallization of amorphous silicon films under the action of pulsed excimer laser radiation

Author: Efremov M.   Volodin V.   Arzhannikova S.   Kochubei S.   Ulasyuk V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.31, Iss.2, 2005-02, pp. : 128-131

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