Effect of elastic interactions on the formation of silicon nanocrystals on noncrystalline substrates in microwave low-pressure gas discharge plasma

Author: Nefedov D.   Yafarov R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.33, Iss.4, 2007-04, pp. : 284-287

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