Changes in the elemental composition and microstructure of an YBa₂Cu₃O_{7 − δ} target during magnetron sputtering

Author： Masterov D. Drozdov M. Drozdov Yu. Pavlov S. Parafin A. Yunin P.

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.39, Iss.10, 2013-10, pp. : 862-865

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