Ionization of sputtered metal atoms in a microwave ECR plasma source

Author： Poluektov N. Kharchenko V. Usatov I.

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.27, Iss.7, 2001-07, pp. : 625-633

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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