Controlling plasma composition during carbon film deposition in microwave discharges by means of optical-emission spectroscopy

Author： Dvorkin V.   Dzbanovskii N.   Minakov P.   Suetin N.   Yur'ev A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.29, Iss.9, 2003-09, pp. : 789-795

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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