Characteristics of a transverse RF discharge in Xe/Cl2 mixtures

Author: Shuaibov A.   Dashchenko A.   Shevera I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-780X

Source: Plasma Physics Reports, Vol.30, Iss.5, 2004-05, pp. : 437-441

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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