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Half-Title Page

Title Page

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Contents

Preamble: Rutherford and IBA

Introduction

I.1. Interactions with electrons

I.2. Elastic scattering from nuclei

I.3. Nuclear reactions

1. Fundamentals of Ion-solid Interactions with a Focus on the Nanoscale

1.1. General considerations

1.1.1. Wavelengths of ions, electrons and X-rays

1.1.2. Penetration depths of ions, electrons and X-rays

1.2. Basic physical concepts

1.2.1. Energy loss and range of ions in matter

1.2.2. Energy straggling

1.2.3. Elastic scattering

1.3. Channeling, shadowing and blocking

1.3.1. Channeling

1.3.2. Shadowing

1.3.3. Blocking

1.4. 1D layers: limits to depth resolution

1.5. 2D and 3D objects: aspects of lateral resolution

1.5.1. Beam focusing

1.5.2. Simulation of nanostructures

2. Instruments and Methods

2.1. Instruments

2.1.1. Accelerators

2.1.2. Detectors and data acquisition

2.1.3. Analysis chambers

2.2. Methods

2.2.1. RBS and MEIS

2.2.2. ERDA

2.2.3. Narrow resonance profiling

3. Applications

3.1. Example of resonances/light element profiling

3.1.1. Introduction

3.1.2. Channeling study of the SiO2/Si interface

3.1.3. Narrow resonance profiling and stable isotopic tracing studies of the oxidation of silicon

3.1.4. Thermal oxidation of silicon carbide

3.1.5. Diffusion and reaction of CO in thermal SiO2: transport, exchange and SiC nanocrystal growth

3.2. Quantitative analysis/heavy element profiling

3.2.1. RBS quantitative analysis of quantum dots and quantum wells

3.2.2. CMOS transistors and the race for miniaturization

3.3. Examples of HR-ERD analysis

3.3.1. Introduction

3.3.2. HRBS/HR-ERD comparison

3.3.3. HR-ERD profiles of Al2O3/TiO2 nanolaminates

3.4. Channeling/defect profiling

3.4.1. Introduction

3.4.2. Arsenic implant in ultra-shallow-junctions

3.5. Blocking/strain profiling

3.5.1. Introduction

3.5.2. GaN/AlN system

3.5.3. Si/Ge system

3.6. 3D MEIS/real space structural analysis

3.6.1. Electrostatic analyzer method

3.6.2. Time-of-flight method

4. The Place of NanoIBA in the Characterization Forest

4.1. Introduction

4.2. Scope of physical and chemical characterization

4.2.1. Targeted information by material characterization

4.2.2. Basic principle and instrumentation of material characterization

4.3. Ion-based characterization techniques overview

4.4. Ion-mass-spectroscopy-based characterization techniques versus IBA

4.4.1. Secondary ion mass spectrometry

4.4.2. Atom probe tomography

4.5. Other characterization techniques versus IBA

4.5.1. X-ray photoelectron spectroscopy

4.5.2. X-ray diffraction

4.5.3. X-ray absorption fine structure

4.5.4. Analytical electron microscopy

4.6. Emerging ion-beam-based techniques

4.6.1. Low energy ion scattering

4.6.2. Iono-luminescence

4.6.3. Scanning helium ion microscopy

4.6.4. Grazing incidence fast atoms diffraction

List of Acronyms

Bibliography

Index

Other titles from iSTE in Nanoscience and Nanotechnology

EULA