Reflection Electron Microscopy and Spectroscopy for Surface Analysis

Author: Zhong Lin Wang  

Publisher: Cambridge University Press‎

Publication year: 1996

E-ISBN: 9780511887765

P-ISBN(Paperback): 9780521482660

Subject: TB3 Engineering Materials

Keyword: 工程材料学

Language: ENG

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Reflection Electron Microscopy and Spectroscopy for Surface Analysis

Description

In this book the theories, techniques and applications of reflection electron microscopy (REM), reflection high-energy electron diffraction (RHEED) and reflection electron energy-loss spectroscopy (REELS) are comprehensively reviewed for the first time. The book is divided into three parts: diffraction, imaging and spectroscopy. The text is written to combine basic techniques with special applications, theories with experiments, and the basic physics with materials science, so that a full picture of RHEED and REM emerges. An entirely self-contained study, the book contains much invaluable reference material, including FORTRAN source codes for calculating crystal structures data and electron energy loss spectra in different scattering geometries. This and many other features make the book an important and timely addition to the materials science literature.

Chapter

1.10 The phase object approximation

1.11 Aberration and the contrast transfer function

Part A Diffraction of reflected electrons

2 Reflection high-energy electron diffraction

2.1 The geometry of RHEED

2.2 Surface crystallography

2.2.1 Surface reconstruction

2.2.2 Two-dimensional reciprocal space

2.3 Streaks and Laue rings in RHEED

2.4 Determination of surface structures

2.5 RHEED oscillation and its application in MBE crystal growth

2.6 The kinematical diffraction theory of RHEED

2.6.1 Perfectly ordered surfaces

2.6.2 Completely disordered surfaces

2.6.3 Surfaces with islands

2.6.4 Stepped surfaces

2.6.5 Surfaces with randomly distributed coverage

2.7 Kikuchi patterns in RHEED

3 Dynamical theories of RHEED

3.1 The Bloch wave theory

3.2 Parallel-to-surface multislice theories

3.3 Parallel-to-surface multislice theories II

3.4 Perpendicular-to-surface multislice theory

3.4.1 Multislice solution of the Schrödinger equation for transmission electron diffraction

3.4.2 Applications in RHEED calculations

3.5 Diffraction of disordered and stepped surfaces

3.5.1 A perturbation theory

3.5.2 Stepped surfaces

4 Resonance reflections in RHEED

4.1 The phenomenon

4.2 The resonance parabola and the resonance condition

4.3 The width of the resonance parabola

4.4 The Kikuchi envelope

4.5 Dynamical calculations of resonance scattering

4.5.1 Low-incidence-angle resonance

4.5.2 High-incidence-angle resonance

4.5.3 Resonance at a stepped surface

4.5.4 A steady state wave at a surface

4.6 The effect of valence excitation in resonance reflection

4.6.1 A simplified theory

4.6.2 The effect on surface resonance

4.7 Enhancement of inelastic scattering signals under the resonance condition

Part B Imaging of reflected electrons

5 Imaging surfaces in TEM

5.1 Techniques for studying surfaces in TEM

5.1.1 Imaging using surface-layer reflections

5.1.2 Surface profile imaging

5.1.3 REM of bulk crystal surfaces

5.2 Surface preparation techniques

5.2.1 Natural or as-grown surfaces

5.2.2 Re-crystallization from melting

5.2.3 Annealing polished surfaces

5.2.4 Cleaving bulk crystals

5.3 Experimental techniques of REM

5.3.1 Mounting specimens

5.3.2 Microscope pre-alignment

5.3.3 Forming REM images

5.3.4 Diffraction conditions for REM imaging

5.3.5 Image recording techniques

5.4 Foreshortening effects

5.5 Surface refraction effects

5.6 Mirror images in REM

5.7 The surface mis-cut angle and step height

5.8 Determining surface orientations

5.9 Determining step directions

6 Contrast mechanisms of reflected electron imaging

6.1 Phase contrast

6.2 Diffraction contrast

6.3 Spatial incoherence in REM imaging

6.4 Source coherence and surface sensitivity

6.5 The effect of energy filtering

6.6 Determining the nature of surface steps and dislocations

6.6.1 Step height

6.6.2 Down and up steps

6.7 REM image resolution

6.8 High-resolution REM and Fourier imaging

6.8.1 Imaging a reconstructed layer

6.8.2 Fourier images

6.9 Depth of field and depth of focus

6.10 Double images of surface steps

6.11 Surface contamination

7 Applications of UHV REM

7.1 UHV microscopes and specimen cleaning

7.2 In situ reconstruction on clean surfaces

7.3 Surface atom deposition and nucleation processes

7.4 Surface-gas reactions

7.5 Surface electromigration

7.6 Surface ion bombardment

7.7 Surface activation energy

8 Applications of non-UHV REM

8.1 Steps and dislocations on metal surfaces

8.2 Steps on semiconductor surfaces

8.3 Ceramics surfaces

8.4 In situ dynamic processes on ceramics surfaces

8.5 Surface atomic termination and radiation damage

8.6 Reconstruction of ceramic surfaces

8.7 Imaging planar defects

8.8 As-grown and polished surfaces

PartC Inelastic scattering and spectrometry of reflected electrons

9 Phonon scattering in RHEED

9.1 Inelastic excitations in crvstals

9.2 Phonon excitation

9.2.1 Phonons

9.2.2 The effect of atomic vibrations on the crystal potential

9.2.3 Electron-phonon interactions

9.3 The 'frozen' lattice model

9.4 Calculation of the Debye-Waller factor

9.5 Kinematical TDS in RHEED

9.6 Dynamical TDS in RHEED

9.6.1 The reciprocity theorem

9.6.2 The Fourier transform of Green's function

9.6.3 Green's function theory

9.6.4 A modified parallel-to-surface multislice theory

10 Valence excitation in RHEED

10.1 EELS spectra of bulk crystal surfaces

10.2 The dielectric response theory of valence excitations

10.3 Interface and surface excitations

10.3.1 Classical energy-loss theory

10.3.2 Localization effects in surface excitation

10.4 The average number of plasmon excitations in RHEED

10.5 Excitation of a sandwich layer

10.6 The dielectric response theory with relativistic correction

10.6.1 Maxwell's equations

10.6.2 Valence excitation near an interface

10.6.3 The transverse force on an incident electron

10.6.4 Calculation of REELS spectra

10.7 The quantum theory of valence excitation

10.7.1 The quantum mechanical basis of the classical theory

10.7.2 The density operator and dielectric response theory

10.8 Determination of surface phases

10.9 Multiple-scattering effects

10.9.1 Poisson's distribution law

10.9.2 Measurement of electron penetration depth

10.9.3 Measurement of electron mean traveling distance along a surface

11 Atomic inner shell excitations in RHEED

11.1 Excitation of atomic inner shell electrons

11.2 Atomic inner shell excitation in reflection mode

11.3 Surface ELNES

11.4 Surface EXELFS

11.5 Surface chemical microanalysis

11.6 The effect of strong Bragg beams

11.7 Resonance and channeling effects

11.8 Effective ionization cross-sections

11.9 Impurity segregation at surfaces

11.10 Oxygen adsorption on surfaces

11.11 REELS in MBE

12 Novel techniques associated with reflection electron imaging

12.1 Scanning reflection electron microscopy

12.1.1 Imaging surface steps

12.1.2 Imaging dislocations

12.2 Secondary electron imaging of surfaces

12.3 EDS in RHEED geometry

12.4 Electron holography of surfaces

12.4.1 Principles and theory

12.4.2 Surface holography

12.5 REM with STM

12.5.1 Atomic-resolution surface imaging

12.5.2 Artifacts in STM imaging

12.6 Time-resolved REM and REM with PEEM

12.7 Total-reflection X-ray spectroscopy in RHEED

12.8 Surface wave excitation Auger electron spectroscopy

12.9 LEED and LEEM

Appendix A Physical constants, electron wavelengths and wave numbers

Appendix B The crystal inner potential and electron scattering factor

Appendix C.I Crystallographic structure systems

Appendix C.2 A FORTRAN program for calculating crystallographic data

Appendix D Electron diffraction patterns of several types of crystal structures

Appendix E.I A FORTRAN program for single-loss spectra of a thin crystal slab in TEM

Appendix E.2 A FORTRAN program for single-loss REELS spectra in RHEED

Appendix E.3 A FORTRAN program for single-loss spectra of parallel-to-surface incident beams

Appendix E.4 A FORTRAN program for single-loss spectra of interface excitation in TEM

Appendix F A bibliography of REM, SREM and REELS

References

Materials index

Subject index

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