Vacuum deposition of thin teflon-like films from a supersonic C2F4 jet

Author: Rebrov A.   Timoshenko N.   Shishkin A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1028-3358

Source: Doklady Physics, Vol.49, Iss.12, 2004-12, pp. : 739-742

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