Machining characteristics on the ultra-precision dicing of silicon wafer

Author: Kim Sung-Chul   Lee Eun-Sang   Kim Nam-Hun   Jeong Hae-Do  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.33, Iss.7-8, 2007-07, pp. : 662-667

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