A real time marking inspection scheme for semiconductor industries

Author： Nagarajan R.   Yaacob Sazali   Pandian Paulraj   Karthigayan M.   Amin Shamsudin   Khalid Marzuki  

Publisher： Springer Publishing Company

ISSN： 0268-3768

Source： The International Journal of Advanced Manufacturing Technology, Vol.34, Iss.9-10, 2007-10, pp. : 926-932

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