Applications of Taguchi and design of experiments methods in optimization of chemical mechanical polishing process parameters

Author: Liao Hsin-Te   Shie Jie-Ren   Yang Yung-Kuang  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.38, Iss.7-8, 2008-09, pp. : 674-682

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