Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

Author: Li Wang   Quandai Wang   Xiuqing Hao   Yucheng Ding   Bingheng Lu  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.51, Iss.1-4, 2010-11, pp. : 155-162

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