Accurate characterization of a thick multilayer structure using the marking-layer-based scanning electron microscopy method

Author： Huang Qiushi   Li Haochuan   Zhu Jingtao   Wang Zhanshan   Chen Hong  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.46, Iss.27, 2013-07, pp. : 275105-275109

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